Comparison ledger
KLA .204 PSL Wafer, KLA Altair 8900 Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Altair 8900 Defect |
| Specifications | ||
| Configuration | NIST Traceable[1] | For CMOS Image Sensor Applications[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Module | — | Two Main Devices and a Set of UPS[4] |
| Wires | — | 5, Phases: 3[4] |
| Max AIC | — | 10,000[4] |
| Volts AC | — | 208 V[4] |
| Amps | — | 25[4] |
| Freq | — | 50 / 60 Hz[4] |
| SCCR (A) | — | 5,000[4] |
| Wafer size | — | 8 inch[4] |
| Phases | — | 3[4] |
| Manufacturer | — | KLA[4] |
| Model | — | Altair 8900[4] |
| Tool type | — | Defect inspection system[4] |
| Application | — | CMOS image sensor applications[4] |
| Vintage | — | 2014[4] |
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