Waferpedia

Comparison ledger

.204 PSL Wafer versus Candela CS 20 Surface

KLA .204 PSL Wafer and KLA Candela CS 20 Surface, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA .204 PSL WaferKLA Candela CS 20
Specifications
ConfigurationNIST Traceable[1]
Wafer Size8 inch[1]
TraceabilityNIST[1]
Compatible ToolsSurfscan 6xy0, Sp1[1]
Voltage230V; 6 Amps[2]
Phase50/60Hz; Phase 1[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing