Comparison ledger
KLA .204 PSL Wafer, KLA HRP 220, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | HRP 220KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA HRP 220 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 6 A[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Voltage | — | 115 V[4] |
| Frequency | — | 60 Hz[4] |
| Category | — | Metrology & Inspection[5] |
| Tool type | — | Surface profilometer[5] |
| Model | — | HRP 220[4] |
| Wafer size | — | 8 inch[4] |
| Current | — | 6 A[4] |
| Phase | — | Single Phase[4] |
| Measurement capability | — | In-line surface measurement[6] |
| Vertical resolution | — | Better than 1 nm[6] |
| Analysis software | — | Answer![6] |
| Control-system architecture | — | Windows NT[6] |
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