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KLA

HRP 220

Metrology & InspectionKLA HRP 220 family
Research Quality: 20% complete
HRP 220 — Inventory photo
Fig. 01HRP 220Inventory photo[1]

What is it?

What do the numbers mean?

Power & electrical3

Voltage
115 V[1]
Accurate?
Single Phase[1]
Accurate?
Frequency
60 Hz[1]
Accurate?

Configuration & options1

6 A[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage115 V[1]
  • ConfigurationSingle Phase[1]
  • Frequency60 Hz[1]

Parts & consumables

Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.

  • KLA HRP 220 Hi Mag CameraIn Productionsource[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the HRP 220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HRP 220 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HRP 220 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HRP 220 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HRP 220 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HRP 220 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Equipment inventory listing
  3. [3]KLA-Tencor Web Site Products - Surface Profiling - Producttencor.com (May 1, 1999)web.archive.org
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Last updated Jul 29, 2026.

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