Waferpedia

Comparison ledger

.204 PSL Wafer versus P 16 + Profiler

KLA .204 PSL Wafer and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
P 16 + ProfilerKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA P
Specifications
ConfigurationNIST Traceable[1]Refurbished[2]
Wafer Size8 inch[1]—
TraceabilityNIST[1]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
Option—Stress, 3D. GEM / SECS[2]
Stage—Fully Motorized X-Y,Z, Theta, Level Stage[2]
Stylus—2 um / 60D[2]
OS—Windows XP[2]
Software—Profiler V 7.35[2]
Vertical Range—327 um[2]
.204 PSL Wafer entryP 16 + Profiler entry

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing