Comparison ledger
KLA .204 PSL Wafer, KLA P-7, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | P-7KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA P-7 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| equipment type | — | Stylus profilometer[4] |
| equipment type category | — | Topographical Metrology[5] |
| equipment name as listed | — | Step Profilometer (KLA Tencor P-7)[5] |
| Step Height Range | — | Nanometers to 1000 µm[6] |
| Stylus Tip Radius | — | 2 µm[7] |
| Stylus Bevel | — | 60°[7] |
| Max Scan Length | — | 150 mm[8] |
| Vertical Range | — | 1 mm[8] |
| Sample Size | — | Up to 150 mm[8] |
| Sampling Rate | — | Higher sampling rates increase data resolution, but can introduce noise above 200 Hz[7] |
| Applied Force | — | 0.03 to 50 mg[6] |
| Stylus Material | — | Diamond[6] |
| Phase | — | 115–230 VAC - 50/60 Hz - 10–5 A - Single Phase - 3-Wire Power - 10,000 A SCCR Includes[9] |
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