Comparison ledger
KLA .204 PSL Wafer, KLA SFS 6420 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA SFS |
| Specifications | ||
| Configuration | NIST Traceable[1] | MAIN BODY:[5] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Phase | — | 1 Phase[4] |
| Frequency | — | 60Hz[4] |
| Voltage | — | 208V[4] |
| Wafer size | — | Non patterned wafer particle inspection, 150 mm & 200 mm compatible[5] |
| Install Type | — | stand-alone[5] |
| Source | — | Algon Laser[5] |
| Handler | — | 150 mm & 200 mm Single Open, puck type[5] |
| OS Version | — | Windows 98[5] |
| System Software | — | 4.2[5] |
| Power | — | 208V, 1 phase, 50/60Hz[5] |
| Vacuum | — | ~-23inHg (Spec: >-20inHg / Quick connection)[5] |
| External Exhaust | — | 4" diagram, 2 holes for system and laser[5] |
| Inspection type | — | Non patterned wafer particle inspection[5] |
| Wafer size compatibility | — | 150 mm & 200 mm compatible[5] |
| Light source | — | Algon Laser[5] |
| System software version | — | 4.2[5] |
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