KLA

SFS 6420 Wafer

Metrology & Inspection 150mm KLA SFS family

Research Quality: 20% complete

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SFS 6420 Wafer — Inventory photo — Fig. 01SFS 6420 WaferInventory photo^[1]

Wafer size

150mm

Power

208V^[1]

Vacuum

4" diagram, 2 holes for system and laser^[2]

Optics

Algon Laser^[2]

What is it?

What do the numbers mean?

Power & electrical2

Voltage: 208V^[1]
Power: 208V, 1 phase, 50/60Hz^[2]

Vacuum & pumping2

Vacuum: ~-23inHg (Spec: >-20inHg / Quick connection)^[2]
External Exhaust: 4" diagram, 2 holes for system and laser^[2]

Wafer handling2

Wafer size: Non patterned wafer particle inspection, 150 mm & 200 mm compatible^[2]
Handler: 150 mm & 200 mm Single Open, puck type^[2]

Optics & imaging1

Source: Algon Laser^[2]

Control & software2

STANDARD SOFTWARE VERSIONS:^[2]
System Software: 4.2^[2]

Dimensions & facilities1

POWER AND FACILITIES:^[2]

Accurate?

Configuration & options5

Phase: 1 Phase^[1]
Frequency: 60Hz^[1]; MAIN BODY:^[2]
Install Type: stand-alone^[2]
OS Version: Windows 98^[2]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Voltage208V^[1]
Power208V, 1 phase, 50/60Hz^[2]
Vacuum~-23inHg (Spec: >-20inHg / Quick connection)^[2]
External Exhaust4" diagram, 2 holes for system and laser^[2]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the SFS 6420 Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SFS 6420 Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SFS 6420 Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SFS 6420 Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the SFS 6420 Wafer are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the SFS 6420 Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report