Waferpedia

Comparison ledger

.204 PSL Wafer versus Viper 2401 Defect

KLA .204 PSL Wafer and KLA Viper 2401 Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
Viper 2401 DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferKLA Viper
Specifications
ConfigurationNIST Traceable[1]50/60 Hz[2]
Wafer Size8 inch[1]—
TraceabilityNIST[1]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
Phase—1 Phase[2]
Supply Voltage—100-200, 200-240 V[2]
Interrupt Capacity—10,000 Amps[2]
.204 PSL Wafer entryViper 2401 Defect entry

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing