Comparison ledger
KLA .204 PSL Wafer, Malvern Panalytical X'Pert 3 MRD XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | X'Pert 3 MRD XLMalvern Panalytical | |
|---|---|---|
| OEM | KLA | Malvern Panalytical |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 6" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Malvern Panalytical X'Pert 3 MRD XL |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Power | — | 7 KVA[4] |
| Voltage | — | 230 V[4] |
| Equipment type | — | XRD (X-ray Diffractometer)[4] |
| Model | — | X'Pert 3 MRD XL[4] |
| Make | — | Malvern Panalytical[4] |
| Included detector | — | Pixcel 3D 1X1 MPX3[4] |
| Included wafer holder | — | Wafer Holder MRD, 6 inch[4] |
| Included configuration | — | In Plane Diffraction MRD[4] |
| Wafer size | — | Wafer Holder MRD, 6 inch[4] |
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