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Malvern Panalytical

X'Pert 3 MRD XL

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Malvern Panalytical X'Pert 3 MRD XL is an X-ray diffractometer. Malvern Panalytical X'Pert 3 MRD XL includes a Pixcel 3D detector. Malvern Panalytical X'Pert 3 MRD XL includes wafer holders for 6 inch and 300 mm samples.[1]

X'Pert 3 MRD XL — Inventory photo
Fig. 01X'Pert 3 MRD XLInventory photo[1]

Wafer size

6"

Power

50/60 Hz[1]

Optics

X-Ray Lens PFX[1]

What it is

The Malvern Panalytical X'Pert 3 MRD XL is an X-ray diffractometer used for metrology and inspection.[1]

The X'Pert 3 MRD XL is configured as a diffractometer with an enclosure, wafer holders, sample holders, and a detector package for X-ray measurement tasks.[1]

How it works

General reference — not yet source-verified

An X-ray diffractometer directs X-rays onto a sample and measures the diffracted beams to extract structural information from the material.

A metrology diffractometer commonly uses dedicated optics, slits, mirrors, monochromation elements, and a detector to shape the beam and capture diffraction data from the specimen.

What do the numbers mean?

Power & electrical2

50/60 Hz[1]
Accurate?
Voltage
230 V[1]
Accurate?

Wafer handling4

Included wafer holder
Wafer Holder MRD, 6 inch[1]
Accurate?
Included wafer holder
Wafer Holder 300 MM MRD XL[1]
Accurate?
Wafer size
Wafer Holder MRD, 6 inch[1]
Accurate?
Wafer size
Wafer Holder 300 MM MRD XL[1]
Accurate?

Optics & imaging3

X-Ray Lens PFX[1]
Accurate?
Beam Mask Set[1]
Accurate?
Included detector
Pixcel 3D 1X1 MPX3[1]
Accurate?

Configuration & options20

Power
7 KVA[1]
Accurate?
Includes:[1]
Accurate?
Pneum Beam ATT NI Xpert 3[1]
Accurate?
MRD XL Cradle[1]
Accurate?
Fixed Div. Slits PFX[1]
Accurate?
4X GE (220) AS 12MM PFX[1]
Accurate?
Coll 0.27 Deg PFX[1]
Accurate?
Coll 0.09 Deg PFX[1]
Accurate?
Soller Slits 0,02 RAD[1]
Accurate?
X-Ray Mirror CU MRD PFX[1]
Accurate?
PFX Analyzer CU 2X ASYM[1]
Accurate?
PFX Analyzer CU 3X SYM[1]
Accurate?
Linefocus Kit Lowangle[1]
Accurate?
Hybrid Mono 2X CU MRD PFX[1]
Accurate?
HYB Mon 4x004 CU MRD PFX[1]
Accurate?
4X GE (220) 12 MM PFX[1]
Accurate?
Equipment type
XRD (X-ray Diffractometer)[1]
Accurate?
Model
X'Pert 3 MRD XL[1]
Accurate?
Make
Malvern Panalytical[1]
Accurate?
Included configuration
In Plane Diffraction MRD[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[1]
  • Voltage230 V[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What type of instrument is the X'Pert 3 MRD XL?

The X'Pert 3 MRD XL is an X-ray diffractometer.[1]

Not publicly documented

The following facts about the X'Pert 3 MRD XL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the X'Pert 3 MRD XL are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the X'Pert 3 MRD XL are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the X'Pert 3 MRD XL are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the X'Pert 3 MRD XL are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the X'Pert 3 MRD XL is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 13, 2026.

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