Comparison ledger
KLA .204 PSL Wafer, Nanometrics 9000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 9000Nanometrics | |
|---|---|---|
| OEM | KLA | Nanometrics |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | Windows NT |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nanometrics 9000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Platform | — | Metrology software[4] |
| Operating system | — | Windows XP-based[4] |
| Software architecture | — | Multi-tasking, multi-threaded[5] |
| User interface compliance | — | SEMI E95-0200 compliant user interface[5] |
| Supported systems | — | Nanometrics 9000, 9100, 9200, and 9300 systems[5] |
| Capabilities | — | Simultaneous wafer recipe development and wafer processing[4] |
| Manufacturer | — | Nanometrics[6] |
| Description | — | Nanospec Wafer Metrology film thickness measurement tool[6] |
| Version | — | 200 mm[6] |
| Wafer handling | — | 200 mm wafer only[6] |
| Capability | — | semi-auto measurement system[6] |
| Software platform | — | N2000 metrology software[4] |
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