Nanometrics

9000

Metrology & Inspection Nanometrics 9000 family

Research Quality: 60% complete

9000 — web.archive.org — Fig. 019000web.archive.org^[1]

What it is

The Nanometrics 9000 is a metrology and inspection tool family used for process control in semiconductor manufacturing. The Nanometrics N2000 metrology software supports Nanometrics 9000 systems.^[2]^[1]^[4]

How it works

The Nanometrics N2000 software platform is multi-tasking and multi-threaded. The N2000 interface is SEMI E95-0200 compliant and supports simultaneous wafer recipe development and wafer processing, job queuing, multiple films and stage measurement groups in a single wafer recipe, and direct recipe transfer between standalone and integrated metrology tools.^[2]^[1]

Where it fits in the process flow

General reference — not yet source-verified

The Nanometrics 9000 fits in the process-control portion of the fab flow rather than in wafer fabrication steps that add material or patterns. The tool family supports measurement and inspection after process operations so the results can be used to monitor film formation, lithography outcome, and surface condition.

Applications

The Nanometrics 9000 family is used for film analysis, critical dimension metrology, overlay metrology, defect inspection, surface profiling, and mask metrology.^[2]

Film Analysis
Critical Dimension Metrology
Overlay Metrology
Defect Inspection
Surface Profiling
Mask Metrology

What do the numbers mean?

Wafer handling5

Capabilities: Simultaneous wafer recipe development and wafer processing^[2]2 sources
Capabilities: Multiple films and stage measurement groups in a single wafer recipe^[2]2 sources
Capabilities: Direct recipe transfer between Nanometrics standalone and integrated metrology tools^[2]2 sources
Description: Nanospec Wafer Metrology film thickness measurement tool^[3]
Wafer handling: 200 mm wafer only^[3]

Control & software7

Platform: Metrology software^[2]
Operating system: Windows XP-based^[2]
Operating system: Windows NT-based^[1]
Software architecture: Multi-tasking, multi-threaded^[1]
User interface compliance: SEMI E95-0200 compliant user interface^[1]
Software platform: N2000 metrology software^[2]
User interface compliance: SEMI E95-0200 compliant^[2]

Configuration & options5

Supported systems: Nanometrics 9000, 9100, 9200, and 9300 systems^[1]
Capabilities: Job queuing capabilities^[2]
Manufacturer: Nanometrics^[3]
Version: 200 mm^[3]
Capability: semi-auto measurement system^[3]

Vintage & configurations

Control-system eraWindows NT^[1]

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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What software platform supports the Nanometrics 9000?

The Nanometrics N2000 metrology software supports Nanometrics 9000 systems.^[2]^[1]^[4]

Which other system families does N2000 support?

The N2000 software supports Nanometrics 9000, 9100, 9200, and 9300 systems.^[2]^[1]^[4]

What user interface standard does N2000 support?

The N2000 software provides a SEMI E95-0200 compliant user interface.^[2]^[1]

Not publicly documented

The following facts about the 9000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 9000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
No publicly documented failure modes or field errata for the 9000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 9000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 9000 are on record.
Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (5)Every fact above is drawn from these public sources

[1]web.archive.org — web.archive.orgweb.archive.org
[2]web.archive.org — web.archive.orgweb.archive.org
[3]fabsurplus.comfabsurplus.com
[4]Nanometrics 9000 family | Waferpedia — waferpedia.comwaferpedia.com
[5]9000 — Nanometrics | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com