Waferpedia

Nanometrics

9000

Metrology & InspectionNanometrics 9000 family
Research Quality: 40% complete
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9000 — web.archive.org
Fig. 019000web.archive.org[1]

What is it?

Nanometrics N2000 is described as a mature, Windows NT-based, multi-tasking, multi-threaded metrology software platform. The sources state that it supports Nanometrics 9000, 9100, 9200, and 9300 systems and provides a SEMI E95-0200 compliant user interface, job queuing, multiple films and stage measurement groups in a single wafer recipe, and direct recipe transfer between Nanometrics standalone and integrated metrology tools.

What can it run?

Process applications and technology nodes documented for this tool.

  • Film Analysis
  • Critical Dimension Metrology
  • Overlay Metrology
  • Defect Inspection
  • Surface Profiling
  • Mask Metrology

What do the numbers mean?

Wafer handling3

Capabilities
Simultaneous wafer recipe development and wafer processing[2]
Accurate?
Capabilities
Multiple films and stage measurement groups in a single wafer recipe[2]
Accurate?
Capabilities
Direct recipe transfer between Nanometrics standalone and integrated metrology tools[2]
Accurate?

Control & software5

Platform
Metrology software[2]
Accurate?
Operating system
Windows XP-based[2]
Accurate?
Operating system
Windows NT-based[1]
Accurate?
Software architecture
Multi-tasking, multi-threaded[1]
Accurate?
User interface compliance
SEMI E95-0200 compliant user interface[1]
Accurate?

Configuration & options2

Supported systems
Nanometrics 9000, 9100, 9200, and 9300 systems[1]
Accurate?
Capabilities
Job queuing capabilities[2]
Accurate?

Vintage & configurations

Control-system eraWindows NT[1]

Interested in this tool?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the 9000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 9000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 9000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • No publicly documented failure modes or field errata for the 9000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 9000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 9000 are on record.

    Answerable by: an OEM parts catalog or a service engineer

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]web.archive.org — web.archive.orgweb.archive.org
  2. [2]web.archive.org — web.archive.orgweb.archive.org
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Last updated Jul 29, 2026.

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