Comparison ledger
KLA .204 PSL Wafer, Nikon L 200 N, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | L 200 NNikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | w/ TH 200 Wafer Loader |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon L 200 N |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| Wafer size | — | w/ TH 200 Wafer Loader[5] |
| OEM | — | Nikon[5] |
| Model | — | L 200 N[5] |
| Equipment type | — | Microscope[5] |
| Wafer loader | — | TH 200 Wafer Loader[5] |
| Inspection use | — | Inspection of integrated circuits, flat panel displays, large scale integration electronic devices, wafers, and other substrates[1] |
| Make | — | Nikon[5] |
| Inspection type | — | Exceptional precise optical inspection[1] |
| Integrated loader | — | TH 200 Wafer Loader[5] |
| Loader integration | — | NWL200 wafer loader[1] |
| Supported applications | — | Inspection of integrated circuits (IC), flat panel displays (FPD), large scale integration (LSI) electronic devices, wafers, reticules, and other substrates[1] |
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