Waferpedia

Nikon

L 200 N

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Wafer size

w/ TH 200 Wafer Loader

Optics

Exceptional precise optical inspection[2]

What it is

The L 200 N is a reflected-light instrument for inspection work on semiconductor and related industrial substrates. The model supports integration with a wafer loader for wafer inspection tasks.[2]

How it works

The L 200 N uses optical microscopy to inspect surfaces and patterns at high precision. The microscope supports brightfield, darkfield, polarizing, differential interference contrast, and epi-fluorescence observation modes.[2]

The L 200 N uses a reflected-light optical path and can be configured with a motorized universal sextuple nosepiece. The microscope provides fine focus and stage motion controls for precise manual inspection work.[2]

Where it fits in the process flow

The L 200 N can support inspection of bare wafers and low-contrast samples. The microscope's focusing and contrast methods are intended to make alignment, feature review, and surface inspection more practical on production materials.[2]

Applications

The L 200 N is used for inspection of integrated circuits, flat panel displays, large scale integration electronic devices, wafers, reticles, and other substrates. The model is also positioned for semiconductor and photovoltaic device inspection.[2]

What do the numbers mean?

Wafer handling8

Wafer size
w/ TH 200 Wafer Loader[1]
Accurate?
Wafer size
8 inch[1]
Accurate?
Wafer loader
TH 200 Wafer Loader[1]
Accurate?
Inspection use
Inspection of integrated circuits, flat panel displays, large scale integration electronic devices, wafers, and other substrates[2]
Accurate?
Wafer size
200 mm[2]
Accurate?
Integrated loader
TH 200 Wafer Loader[1]
Accurate?
Loader integration
NWL200 wafer loader[2]
Accurate?
Supported applications
Inspection of integrated circuits (IC), flat panel displays (FPD), large scale integration (LSI) electronic devices, wafers, reticules, and other substrates[2]
Accurate?

Optics & imaging1

Inspection type
Exceptional precise optical inspection[2]
Accurate?

Configuration & options4

OEM
Nikon[1]
Accurate?
Model
L 200 N[1]
Accurate?
Equipment type
Microscope[1]
Accurate?
Make
Nikon[1]
Accurate?

Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
L300N——The L300N series is for 300 mm wafers.industry.nikon.com[2]
L200ND——The L200ND includes episcopic/diascopic illumination and motorized control for nosepiece, light intensity control, aperture diaphragm control, and episcopic/diascopic change-over.industry.nikon.com[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size is the Nikon L 200 N series specified for?

The Nikon L 200 N series is specified for 200 mm wafers.[2]

What observation methods does the Nikon L 200 N support?

The Nikon L 200 N supports brightfield, darkfield, simple polarizing, differential interference contrast, and epi-fluorescence in reflected-light observation.[2]

Can the Nikon L 200 N be integrated with a wafer loader?

The Nikon L 200 N can be integrated with the NWL200 wafer loader.[2]

What control functions are motorized on the Nikon L 200 N?

The Nikon L 200 N provides motorized control for the nosepiece, light intensity, and aperture diaphragm.[2]

Does the Nikon L 200 N support software-connected microscope control?

The Nikon L 200 N detects and controls the objective lens in use, light intensity, episcopic illumination, and aperture through a USB connection to NIS-Elements software.[2]

Not publicly documented

The following facts about the L 200 N are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the L 200 N are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the L 200 N are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the L 200 N are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the L 200 N is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the L 200 N are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]industry.nikon.com — industry.nikon.comindustry.nikon.com
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Last updated Oct 16, 2026.

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