Comparison ledger
KLA .204 PSL Wafer, Nikon NWL 851, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NWL 851Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon NWL 851 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Make | — | Nikon[4] |
| Model | — | NWL 851[4] |
| Wafer size | — | 8 inch[4] |
| Type | — | Wafer loader[5] |
| Stage | — | Large 8-inch compatible stage[5] |
| Stage travel | — | X-Y stroke 205 mm[5] |
| Rotating holder | — | 8-inch rotating holder[5] |
| Observation methods | — | Reflected bright field / reflected dark field[5] |
| Objective lenses | — | CF Plan 5× BD NA0.135 / 10× BD NA 0.30 / 50× BD NA 0.80[5] |
| Eyepiece | — | CFIUW 10/25× 2 (magnification 10×, field of view 25 mm)[5] |
| Illumination device | — | LA 150 UX halogen lamp, 150 W[5] |
| Revolver | — | ACP 21 with motorized switching controller (5 holes)[5] |
| Tube | — | 3 erect images, with C-mount adapter[5] |
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