Comparison ledger
KLA .204 PSL Wafer, Olympus BX 60 M, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | BX 60 MOlympus | |
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Olympus BX 60 M |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Make | — | Olympus[4] |
| Model | — | BX 60 M[4] |
| Optical type | — | optical metallographic microscope[5] |
| Lighting | — | reflected light brightfield and darkfield illumination[6] |
| Viewing head | — | trinocular viewing head[6] |
| Eyepieces | — | 10x[6] |
| Stage | — | XY stage[6] |
| Focusing | — | coaxial coarse and fine adjustment[6] |
| Light source | — | 12v 100w reflected illuminator[6] |
| Objective lenses | — | MPlan BF / DF 5x, 10x, 20x, 50x[6] |
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