Comparison ledger
KLA .204 PSL Wafer, Onto Innovation NSX 105, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 105Onto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 12" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Onto Innovation NSX 105 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Load port and stage[5] |
| Wafer Size | 8 inch[3] | 8 inch[1] |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| Wafer size | — | 12" wafer stage[1] |
| power | — | 200-240 VAC[8] |
| Wafer Stage | — | 12 inch wafer stage[1] |
| Chamber Count | — | 1 Chamber[6] |
| Load Ports | — | 2x Load port (6",8")[1] |
| Robot & Aligner | — | Brooks Robot & Aligner[1] |
| Optics | — | 5x Optic Lens with CCD 3D Camera (Sony)[1] |
| Frequency | — | 50/60 Hz[8] |
| Power | — | 200-240 VAC, Single Phase + GND[8] |
| Make | — | ONTO / Rudolph / August[5] |
| Model | — | NSX 105[5] |
| Wafer Sizes | — | 8 inch[7] |
| Load port and stage | — | Included[5] |
| Chuck | — | Included[5] |
| Micro camera | — | Included[5] |
| CCD | — | Included[5] |
| Monitor, Keyboard, Main PC | — | Included[5] |
| Chambers | — | 1 Chamber[6] |
| Vintage | — | 2007[6] |
| Wafer stage | — | 12" wafer stage[7] |
| Optics / Camera | — | 5x Optic Lens with CCD 3D Camera (Sony)[7] |
| Load ports | — | Load port 6", 8" (x2)[7] |
| Mains frequency | — | 50/60 Hz[8] |
| OEM | — | ONTO / Rudolph / August[5] |
| Equipment type | — | Inspection System[5] |
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