Onto Innovation
NSX 105
What is it?
What do the numbers mean?
Power & electrical2
Wafer handling3
Optics & imaging2
Control & software1
- Monitor, Keyboard, Main PC[1]
Configuration & options7
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSX 105 | — | 2003–2007 | Source records describe configurations including 1 chamber / 2LP, load ports for 6" and 8", Brooks robot and aligner, 12" wafer stage, and CCD 3D camera options, with vintages stated as 2003, 2004, and 2007. | Equipment inventory listing[6] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Parts & consumables
Tracked replaceable assemblies, spares criticality, and availability status across all major subsystems. Each entry cites its source.
- ONTO / Rudolph / August NSX 105 Spare PartsIn Productionsource[9]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the NSX 105 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 105 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSX 105 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 105 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 105 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly hosted manuals, SOPs, or datasheets for the NSX 105 are on record.
Answerable by: university cleanroom staff or an OEM application specialist
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (9)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
- [6]inventory listing
- [7]inventory listing
- [8]inventory listing
- [9]Equipment inventory listing
Last updated Jul 29, 2026.
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