Comparison ledger
KLA .204 PSL Wafer, Onto Innovation WaferView 210 Auto Macro, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | WaferView 210 Auto MacroOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Onto Innovation WaferView 210 Auto Macro |
| Specifications | ||
| Configuration | NIST Traceable[1] | Impaired PC and light source[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Make | — | ONTO / Rudolph[4] |
| Model | — | WaferView 210[4] |
| Full name | — | ONTO / Rudolph WaferView 210 Auto Macro Inspection System[4] |
| Vintage | — | 2001 / 2002[4] |
| Condition note | — | Impaired PC and light source[4] |
| OEM | — | Onto Innovation[6] |
| Equipment type | — | wafer inspection and metrology system[7] |
| Inspection class | — | macro inspection class[7] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →