Comparison ledger
KLA .204 PSL Wafer, Rigaku MiniFlex II Benchtop, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | MiniFlex II BenchtopRigaku | |
|---|---|---|
| OEM | KLA | Rigaku |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Rigaku MiniFlex |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Tool type | — | Benchtop X-ray diffractometer[4] |
| Power | — | 50/60 Hz[4] |
| Electrical input | — | 100/115 Vac[4] |
| Measurement applications | — | Diffraction pattern comparison of polycrystalline materials such as powder samples and metal plates; qualitative and quantitative analyses; quality management of raw materials and products[5] |
| Sample changer | — | Automated six sample changer[5] |
| Monochromator option | — | Monochromator addition that captures X-rays other than Cu Kα[5] |
| Goniometer type | — | Vertical[5] |
| Goniometer radius | — | 150 mm[5] |
| Scanning axis | — | θ/2θ interlocked[5] |
| Detector scintillator | — | NaI (T1)[5] |
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