Comparison ledger
KLA .204 PSL Wafer, SCREEN ZI 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ZI 2000SCREEN | |
|---|---|---|
| OEM | KLA | SCREEN |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | SCREEN ZI 2000 |
| Specifications | ||
| Configuration | NIST Traceable[1] | 50/60 Hz[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Phase | — | 1 Phase[4] |
| Make | — | SCREEN / DNS[4] |
| Model | — | ZI 2000[4] |
| Power | — | 1 phase, 50/60 Hz[4] |
| Included PCs | — | Conveyance PC, External PC, Control PC[4] |
| Included components | — | Monitor, Parts[4] |
| Wafer size | — | φ76 mm to φ200 mm[5] |
| Transfer | — | Robot transfer system[5] |
| Inspection method | — | Comparative (Die to Die, Cell to Cell)[5] |
| Light source | — | RGB 3-color LED lighting (choice of 3 colors)[5] |
| Optical resolution | — | 1.5 μm × 1.5 μm; 4 μm × 4 μm[5] |
| Dimensions (W×D×H) | — | 1,400 mm × 1,250 mm × 2,030 mm[5] |
| Vintage | — | 2013[4] |
| Dimensions (WxDxH) | — | 1,400 mm 1,250 mm 2,030 mm[5] |
| Power / phase / frequency | — | 1 Phase - 50/60 Hz[4] |
| Included items | — | Conveyance PC, External PC, Control PC, Monitor, Parts[4] |
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