Comparison ledger
KLA .204 PSL Wafer, Sonoscan D9650, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | D9650Sonoscan | |
|---|---|---|
| OEM | KLA | Sonoscan |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Sonoscan D9650 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Instrument type | — | C-SAM acoustic microscope[4] |
| Product line context | — | Test and inspection product[4] |
| Model | — | D9650[4] |
| Type | — | C-SAM acoustic microscope[4] |
| Detection principle | — | Pulsed ultrasound at frequencies from 10 MHz to 230 MHz[5] |
| Inspection modes | — | A-Scan, B-Scan, C-Scan, Bulk Scan, Multi Scan, Surface Scan, Interface Scan, Loss of Back Echo (LoBE), Q-BAM, 3D TOF, optional THRU-Scan, optional Simultaneous THRU-scan and Reflection STaR[6] |
| Scan area | — | 314 mm x 314 mm[6] |
| X-Y accuracy | — | ±0.5 μm[6] |
| Transducer range | — | 5 MHz to 230 MHz[6] |
| Digitizer | — | 1 GSPS at 8 bits[6] |
| Operating system | — | Windows 10 or Windows 11[6] |
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