Sonoscan
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The Sonoscan D9650 is a C-SAM acoustic microscope. The Sonoscan D9650 uses pulse-echo acoustic imaging for non-destructive internal inspection and defect detection. The Sonoscan D9650 supports up to a 300 mm wafer or dual JEDEC trays.[1]
Acoustic microscopes are nondestructive inspection tools that use ultrasound to image internal features and hidden interfaces in solid materials and electronic assemblies. Acoustic microscopes are used to reveal defects such as voids, cracks, delamination, and bond separation that are not visible from the exterior.
The Sonoscan D9650 can simultaneously capture 100 depths of interest with independent gains, color maps, and waveform analysis through PolyGate. The Sonoscan D9650 supports A-Scan, B-Scan, C-Scan, Bulk Scan, Multi Scan, Surface Scan, Interface Scan, Loss of Back Echo, Q-BAM, and 3D TOF imaging modes. The Sonoscan D9650 offers optional THRU-Scan and optional simultaneous THRU-scan and reflection STaR. The Sonoscan D9650 includes waveform analysis modes for amplitude, integration, profile, time difference, acoustic surface flatness, and polarity information. The Sonoscan D9650 uses a pulser and receiver optimized for transducers from 5 MHz to 230 MHz. The Sonoscan D9650 has a mechanical scan area of 314 mm by 314 mm and X-Y accuracy of ±0.5 μm.[3][4]
The Sonoscan D9650 is positioned for failure analysis, process development, material characterization, low-volume production, and other laboratory inspections. The Sonoscan D9650 includes AutoScan for automatic inspection and analysis of an arrangement of parts on trays through pre-programmed instructions for location, focus, scan size, and analysis.[3][4]
The Sonoscan D9650 is intended for detailed acoustic inspections in failure analysis, process development, material characterization, and low-volume production. The Sonoscan D9650 can use Digital Image Analysis for quantifying acoustic data, including area fraction analysis, image enhancement, histogram, FFT, multi-area analysis, and thickness calculations. The Sonoscan D9650 also offers optional modules for acoustic impedance measurement, thickness measurement, and spectral analysis.[3][4]
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The Sonoscan D9650 is a C-SAM acoustic microscope for detailed acoustic inspections.[1][3][5]
The Sonoscan D9650 supports A-Scan, B-Scan, C-Scan, Bulk Scan, Multi Scan, Surface Scan, Interface Scan, Loss of Back Echo, Q-BAM, and 3D TOF. The Sonoscan D9650 also offers optional THRU-Scan and optional simultaneous THRU-scan and reflection STaR.[3][4]
The Sonoscan D9650 can simultaneously capture 100 depths of interest with independent gains, color maps, and waveform analysis through PolyGate.[3][4]
The following facts about the D9650 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the D9650 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the D9650 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the D9650 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the D9650 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the D9650 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 17, 2026.
The KLA .204 PSL Wafer is an 8-inch NIST-traceable reference wafer compatible with Surfscan 6xy0 and Sp1 particle counters.
KLA .496 PSL Wafer is an 8-inch NIST traceable wafer stated to be capable on Surfscan 6xy0 and SP1.
The KLA .498 PSL Wafer is a NIST traceable reference wafer.