Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Helios NanoLab 600 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Helios NanoLab 600 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Helios NanoLab 600 FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Schottky FE mounted on the NG hot swap gun module[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Magnification | — | 69x-2300000x[4] |
| Stage Control | — | 5 axes motorized XYZRT 6” UHR stage with piezo control[4] |
| Beam - Schottky FE mounted on NG hot swap gun module | — | Schottky field emitter on NG hot swap gun module[4] |
| Beam - Gallium Liquid Metal | — | Gallium liquid metal ion source[4] |
| Beam - ELSTAR | — | ELSTAR[4] |
| Beam - Sidewinder | — | Sidewinder ion column[4] |
| Electron Column | — | Present[4] |
| ION Column | — | Present[4] |
| Resolution (Optional WD) - 15 kV | — | 0.9 nm @ 15 kV (optional WD), 1.4 nm @ 15 kV (optional WD)[4] |
| Resolution (Coincident WD) - 15 kV | — | 1 nm @ 15 kV[4] |
| Resolution (Coincident WD) - 5 kV | — | 1.6 nm @ 5 kV[4] |
| Resolution (Coincident WD) - kV (unspecified) | — | 2.5 nm @ (unspecified kV)[4] |
| Resolution (Coincident WD) - 30 kV | — | 5 nm @ 30 kV[4] |
| Stage Travel - X/Y | — | 150 mm[4] |
| Stage Travel - Z | — | 0-20 mm[4] |
| Stage Tilt | — | -10° to +60°[4] |
| Detector | — | Through-lens detection (TLD) for SE and BSE[4] |
| Omniprobe | — | Autoprobe 200[4] |
| STEM Detector | — | Retractable[4] |
| Plasma Cleaner | — | Ibss Group GV10x[4] |
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