Comparison ledger
KLA .204 PSL Wafer, Thermo Fisher Scientific FEI Nova NanoLab 200 FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Scientific FEI Nova NanoLab 200 FIB-SEMThermo Fisher | |
|---|---|---|
| OEM | KLA | Thermo Fisher |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Thermo Fisher Scientific FEI Nova NanoLab 200 FIB-SEM |
| Specifications | ||
| Configuration | NIST Traceable[1] | Dual Beam Ga FIB[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Process | — | PFA FIB Cut[5] |
| Last PM on Oct 2023 | — | Tool Functional, Performance within PM Spec[4] |
| PC System | — | Windows XP[4] |
| GIS Components | — | XeF2 & Pt Coating Probes[4] |
| Last PM | — | Oct 2023[4] |
| Functional status | — | Tool Functional, Performance within PM Spec[4] |
| SE Detectors | — | Two SE Detectors[4] |
| BSE Detector | — | No BSE Detector[4] |
| EDS | — | No EDS[5] |
| HDD | — | Does not come with HDD[5] |
| Make | — | Thermo Fisher Scientific / FEI[4] |
| Model | — | Nova NanoLab 200[4] |
| Tool type | — | Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)[4] |
| Beam configuration | — | Dual-beam Ga FIB[4] |
| Control system | — | Windows XP[4] |
| Missing GIS components | — | XeF2 and Pt coating probes[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →