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Thermo Fisher

Scientific FEI Nova NanoLab 200 FIB-SEM

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The Scientific FEI Nova NanoLab 200 FIB-SEM is a dual-beam Ga FIB-SEM with a focused ion beam and scanning electron microscope configuration. The Scientific FEI Nova NanoLab 200 FIB-SEM has two SE detectors and no BSE detector. The Scientific FEI Nova NanoLab 200 FIB-SEM does not come with an HDD.[1][2]

Scientific FEI Nova NanoLab 200 FIB-SEM — Inventory photo
Fig. 01Scientific FEI Nova NanoLab 200 FIB-SEMInventory photo[1]

What it is

The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM is a focused ion beam and scanning electron microscope system. The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM has a dual-beam Ga FIB-SEM configuration. The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM is categorized under metrology and inspection.[1][2]

How it works

The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM has two SE detectors. The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM has no BSE detector. The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM has no EDS. The Thermo Fisher Scientific / FEI Nova NanoLab 200 FIB-SEM uses a Windows XP PC system.[1][2]

Applications

General reference — not yet source-verified

FIB-SEM systems are used for site-specific cross-sectioning, delayering, circuit edit support, defect localization, and specimen preparation for downstream microscopy. FIB-SEM systems are also used to expose subsurface structures and to inspect process features that are difficult to evaluate with surface imaging alone. In semiconductor work, such tools support failure analysis and development investigations on patterned wafers and devices.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • No BSE detector
  • Does not come with HDD
  • Missing GIS components: XeF2 and Pt coating probes

What do the numbers mean?

Optics & imaging4

Two SE Detectors[1]
Accurate?
No BSE Detector[1]
Accurate?
SE Detectors
Two SE Detectors[1]
Accurate?
BSE Detector
No BSE Detector[1]
Accurate?

Control & software2

PC System
Windows XP[1]
Accurate?
Control system
Windows XP[1]
Accurate?

Configuration & options16

Dual Beam Ga FIB[1]
Accurate?
Process
PFA FIB Cut[2]
Accurate?
Last PM on Oct 2023
Tool Functional, Performance within PM Spec[1]
Accurate?
No EDS[1]
Accurate?
Doe not come with HDD[1]
Accurate?
Missing Parts:[1]
Accurate?
GIS Components
XeF2 & Pt Coating Probes[1]
Accurate?
Last PM
Oct 2023[1]
Accurate?
Functional status
Tool Functional, Performance within PM Spec[1]
Accurate?
EDS
No EDS[2]
Accurate?
HDD
Does not come with HDD[2]
Accurate?
Make
Thermo Fisher Scientific / FEI[1]
Accurate?
Model
Nova NanoLab 200[1]
Accurate?
Tool type
Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)[1]
Accurate?
Beam configuration
Dual-beam Ga FIB[1]
Accurate?
Missing GIS components
XeF2 and Pt coating probes[2]
Accurate?
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Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What GIS components are missing from this system?

The gas injection system (GIS) components that are missing are the XeF2 and platinum coating probes.[1][2]

What is the process application designated for this tool?

The system is configured for a process called PFA FIB Cut (Physical Failure Analysis Focused Ion Beam Cut).[1][2]

Not publicly documented

The following facts about the Scientific FEI Nova NanoLab 200 FIB-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scientific FEI Nova NanoLab 200 FIB-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Scientific FEI Nova NanoLab 200 FIB-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Scientific FEI Nova NanoLab 200 FIB-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Scientific FEI Nova NanoLab 200 FIB-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Scientific FEI Nova NanoLab 200 FIB-SEM are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]Inventory photo
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Last updated Oct 15, 2026.

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