Comparison ledger
KLA .204 PSL Wafer, Zeiss 1540 EsB FIB-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1540 EsB FIB-SEMZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Zeiss 15xx |
| Specifications | ||
| Configuration | NIST Traceable[1] | Dual Beam[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| OEM | — | Zeiss[4] |
| Model | — | 1540 EsB[4] |
| Tool type | — | Focused Ion Beam - Scanning Electron Microscope (FIB-SEM)[4] |
| Included analysis | — | EDX is included[4] |
| Detector | — | 10mm EDAX detector[5] |
| Known issue | — | Known issue with Ion Pump for FIB capability[4] |
| Vintage | — | 2014[6] |
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