1540 EsB FIB-SEM

The Zeiss 1540 EsB FIB-SEM is a focused ion beam and scanning electron microscope. The Zeiss 1540 EsB FIB-SEM is a dual-beam instrument. The Zeiss 1540 EsB FIB-SEM includes EDX.^[4][1][2]

A FIB-SEM uses an ion column to remove material from a selected area and an electron column to image the exposed structure. A dual-beam arrangement lets the instrument alternate between milling and observation within the same chamber. An EDX subsystem supports elemental analysis during inspection work.

A FIB-SEM is typically used after fabrication steps when a sample needs physical inspection below the surface. A FIB-SEM fits analytical and engineering flows for process review, defect review, yield investigation, and failure analysis. FIB-SEM work often follows screening that identifies a region of interest and can precede further analytical examination of the prepared cross section.

A FIB-SEM is used to expose buried features, inspect interfaces, and study structural defects in semiconductor and microfabricated samples. A FIB-SEM supports localized cross-section preparation, review of patterned layers, and preparation of regions for compositional analysis. A FIB-SEM is also used in materials research and package analysis where precise removal and imaging of small areas are needed.