Waferpedia

Zeiss

1540 EsB FIB-SEM

Metrology & InspectionZeiss 15xx family
Research Quality: 20% complete
1540 EsB FIB-SEM — Inventory photo
Fig. 011540 EsB FIB-SEMInventory photo[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Known issue with Ion Pump for FIB capability

What do the numbers mean?

Vacuum & pumping1

Known issue with Ion Pump for FIB capability[3]
Accurate?

Optics & imaging1

10mm EDAX detector[3]
Accurate?

Configuration & options2

Dual Beam[3]
Accurate?
EDX is included[3]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationKnown issue with Ion Pump for FIB capability[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Frequently asked questions

What type of instrument is the Zeiss 1540 EsB?

It is a focused ion beam–scanning electron microscope (FIB-SEM).[3][1]

Does the equipment include EDX?

Yes. EDX is included.[3]

Not publicly documented

The following facts about the 1540 EsB FIB-SEM are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1540 EsB FIB-SEM are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 1540 EsB FIB-SEM are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 1540 EsB FIB-SEM are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the 1540 EsB FIB-SEM is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 1540 EsB FIB-SEM are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]inventory listing
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Last updated Jul 29, 2026.

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