Comparison ledger
KLA .204 PSL Wafer, Zeiss O Inspect 322 CMM, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | O Inspect 322 CMMZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Zeiss O Inspect 322 CMM |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Measuring volume X = 300 mm, Y = 200 mm, Z = 200 mm[5] |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| P/N | — | 636520-9932-000[1] |
| Measuring volume X | — | 300 mm[5] |
| Measuring volume Y | — | 200 mm[5] |
| Measuring volume Z | — | 200 mm[5] |
| Measurement technology | — | Multisensor (optical, tactile passive)[5] |
| Pre-wired for optical sensor | — | Pre-wired for DotScan optical sensor[5] |
| Control | — | PC-based Integrated Scanning Control (ISC)[5] |
| Vibration damping | — | Integrated passive vibration damping[5] |
| Reference sphere diameter | — | 25 mm[5] |
| Reference ring inner diameter | — | 16 mm[5] |
| Optical calibration template | — | for Discovery Zoom lens[5] |
| Control panel | — | Wired control panel with two joysticks, power ON switch[5] |
| Tactile sensor | — | VAST XXT TL3 sensor[5] |
| Adapter plate | — | One VAST XXT TL3 adapter plate with embedded ID chip[5] |
| Network Interface | — | Network Interface Card (NIC) I201-T1 GbE[5] |
| Software | — | CALYPSO basis cnc + curve + VAST probing, BasLic, Dongle[5] |
| Multisensor technology | — | Optical, tactile passive[5] |
| Pre-wired for DotScan optical sensor | — | Yes[5] |
| Integrated Scanning Control (ISC) | — | PC-based[5] |
| Reference sphere | — | Diameter 25 mm[5] |
| Reference ring | — | Inner diameter 16 mm[5] |
| Sensor | — | VAST XXT TL3[5] |
| Network Interface Card | — | NIC I201-T1 GbE[5] |
| Electrical | — | 100-240 V, 50-60 Hz, max 600 VA[1] |
| OEM | — | Zeiss[6] |
| Model | — | O Inspect 322[6] |
| Equipment type | — | Coordinate Measuring Machine (CMM)[6] |
| Measuring volume | — | X = 300 mm, Y = 200 mm, Z = 200 mm[5] |
| Optical sensor readiness | — | Pre-wired for DotScan optical sensor[5] |
| Integrated scanning control | — | PC-based Integrated Scanning Control (ISC)[5] |
| Software / control package | — | CALYPSO basis cnc + curve + VAST probing, BasLic, Dongle[5] |
| Power | — | 100-240 V[1] |
| Frequency | — | 50-60 Hz[1] |
| Maximum power | — | Max. 600 VA[1] |
| Part number | — | 636520-9932-000[1] |
| Vintage | — | 2022[1] |
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