Comparison ledger
KLA 2132 and KLA Alpha Step D 300 Stylus, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2132KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2132 | KLA Alpha Step |
| Specifications | ||
| Product type | Wafer inspection system[1] | — |
| Relationship to KLA 2135 | Earlier model than the KLA 2135[1] | — |
| Wafer size (primary) | 200mm (8")[2] | — |
| Wafer size (alternate) | 4", 5", 6" capable[2] | — |
| Throughput | 2–8 wafers per hour[2] | — |
| Sensitivity | >0.25 µm pixels[2] | — |
| Inspection type | Patterned wafer defect inspection[2] | — |
| Optics | Brightfield, small-pixel, high data rate digital image processing[1] | — |
| User interface | DOS operating system[3] | — |
| SAT capability | Segmented Auto Threshold (SAT) included[2] | — |
| Calibration wafer | 8" DSW calibration wafer included[2] | — |
| Vintage (year of introduction) | 1995[2] | — |
| Configuration | — | Issue with the style module[4] |
| Instrument type | — | Stylus-based surface profiler[5] |
| Stylus tip radius | — | 2 µm[5] |
| Step height measurement range | — | 50 nm to 300 µm[5] |
| Measurement principle | — | Stylus placed in contact with and dragged along the substrate surface; vertical deflection measures change in step height[5] |
| Supported substrate types | — | Silicon, Silicon Germanium, Quartz, Sapphire, Glass, Germanium, Silicon Carbide, Gallium Nitride, III-V, Gallium Arsenide, Polymer, Carbon Polymer Based, Lithium Niobate[5] |
| Supported substrate sizes | — | Pieces, 2 inch, 3 inch, 4 inch, 6 inch wafer[5] |
| Maximum load | — | 1[5] |
| Cleanliness | — | Flexible[5] |
| Stylus scan distance used in roughness testing | — | 3 mm[6] |
| Manufacturer location | — | KLA-Tencor Corporation, Milpitas, CA[6] |
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