KLA
Alpha Step D 300 Stylus
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The KLA AlphaStep D-300 is a stylus-based surface profiler with a stylus tip radius of 2 µm. The KLA AlphaStep D-300 measures step heights from 50 nm to 300 µm by dragging a stylus along the surface and measuring vertical deflection.[1]
What it is
The KLA Alpha Step D 300 is a stylus-based surface profiler used for measuring step heights on substrates. The Alpha Step D 300 is a model of profilometer manufactured by KLA-Tencor. The instrument uses a stylus with a tip radius of 2 micrometers.[1]
How it works
The KLA Alpha Step D-300 uses a stylus that is placed in contact with and then gently dragged along the surface of the substrate. The vertical deflection of the stylus measures changes in step height.[1]
The KLA Alpha Step D 300 uses a stylus to measure surface roughness. For roughness measurements, the stylus is moved across a distance of three millimeters, and the raw roughness data is passed through a high-pass filter to separate roughness from waviness.[3]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Issue with the style module
- Error when trying to run low force setting
What do the numbers mean?
Wafer handling3
- Measurement principle
- Stylus placed in contact with and dragged along the substrate surface; vertical deflection measures change in step height[1]
- Supported substrate types
- Silicon, Silicon Germanium, Quartz, Sapphire, Glass, Germanium, Silicon Carbide, Gallium Nitride, III-V, Gallium Arsenide, Polymer, Carbon Polymer Based, Lithium Niobate[1]
Optics & imaging1
Configuration & options8
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the stylus tip radius of the KLA Alpha Step D-300?
The stylus tip radius of the KLA Alpha Step D-300 is 2 micrometers.[1]
What step height range can the KLA Alpha Step D-300 measure?
The KLA Alpha Step D-300 can measure step heights from 50 nanometers to 300 micrometers.[1]
What substrate sizes are supported by the KLA Alpha Step D-300?
The KLA Alpha Step D-300 supports pieces, and 2-inch, 3-inch, 4-inch, and 6-inch wafers.[1]
Not publicly documented
The following facts about the Alpha Step D 300 Stylus are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Alpha Step D 300 Stylus are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Alpha Step D 300 Stylus are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Alpha Step D 300 Stylus are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Alpha Step D 300 Stylus is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Alpha Step D 300 Stylus are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]snfguide.stanford.edu — snfguide.stanford.edusnfguide.stanford.edu
- [2]Inventory photo
- [3]frontiersin.org — frontiersin.orgfrontiersin.org
Last updated Aug 14, 2026.
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