Comparison ledger
KLA 2132 and KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2132KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2132 | KLA Surfscan |
| Cited variants | — | |
| Specifications | ||
| Product type | Wafer inspection system[3] | — |
| Relationship to KLA 2135 | Earlier model than the KLA 2135[3] | — |
| Wafer size (primary) | 200mm (8")[4] | — |
| Wafer size (alternate) | 4", 5", 6" capable[4] | — |
| Throughput | 2–8 wafers per hour[4] | — |
| Sensitivity | >0.25 µm pixels[4] | — |
| Inspection type | Patterned wafer defect inspection[4] | — |
| Optics | Brightfield, small-pixel, high data rate digital image processing[3] | — |
| User interface | DOS operating system[5] | — |
| SAT capability | Segmented Auto Threshold (SAT) included[4] | — |
| Calibration wafer | 8" DSW calibration wafer included[4] | — |
| Vintage (year of introduction) | 1995[4] | — |
| Configuration | — | 300mm FOUP handler[1] |
| Retested the CPU at bench test | — | CPU boots up with display but mouse and keyboard not working[1] |
| 75mW Laser | — | visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1] |
| Need replacement of Bright Field laser | — | Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1] |
| 2 loadports | — | 1 not functioning[6] |
| Largest Load | — | 26 A (Laser)[6] |
| Input Current | — | 30 A, 3 Phase, 50/60 Hz[6] |
| Phase | — | 3 Phase[2] |
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