Comparison ledger
KLA 2132 and KLA Surfscan SP 1 TBI, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2132KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2132 | KLA Surfscan |
| Specifications | ||
| Product type | Wafer inspection system[1] | — |
| Relationship to KLA 2135 | Earlier model than the KLA 2135[1] | — |
| Wafer size (primary) | 200mm (8")[2] | — |
| Wafer size (alternate) | 4", 5", 6" capable[2] | — |
| Throughput | 2–8 wafers per hour[2] | — |
| Sensitivity | >0.25 µm pixels[2] | — |
| Inspection type | Patterned wafer defect inspection[2] | — |
| Optics | Brightfield, small-pixel, high data rate digital image processing[1] | — |
| User interface | DOS operating system[3] | — |
| SAT capability | Segmented Auto Threshold (SAT) included[2] | — |
| Calibration wafer | 8" DSW calibration wafer included[2] | — |
| Vintage (year of introduction) | 1995[2] | — |
| Phase | — | 208-240 V, Single phase[4] |
| Configuration | — | 50/60 Hz[4] |
| Full Load Amps | — | 24 A[4] |
| Machine Main Breaker Rating | — | 30 A[4] |
| Ampere Rating of Largest Load | — | 12 A[4] |
| Bright Field (DIC) Option, P/N | — | 515990[4] |
| XY Coordination, P/N | — | 0082158-000[4] |
| Bright Field Sizing, P/N | — | 0082158-000[4] |
| Haze Normalization, Haze Analysis, P/N | — | 0081928-000[4] |
| SEC-1, P/N | — | 0021643-000[4] |
| HSMS, P/N | — | 528080[4] |
| PC-NFS Cient, P/N | — | 556025[4] |
| Desktop PC Software Option, P/N | — | 528170[4] |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[4] |
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