Comparison ledger
KLA 2133 Brightfield and KLA 2351, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2351KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer | Wafer Transfer System |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA 2351 |
| Specifications | ||
| Configuration | 2 x 25 Auto Load[1] | With HDD & Software[2] |
| Wafer size | Wafer Transfer[1] | Wafer Transfer System[2] |
| Process Vac | 23 InHg[1] | — |
| Inlet Power | 3 line of 208 Vac 20 Amp[1] | — |
| CDA | 100 PSI[1] | — |
| Exhaust for Cooling | Blower[1] | — |
| Load Port Qty | — | 2[2] |
| Wavelength Illumination | — | 370~720 nm[2] |
| Wavelength Band | — | Visible, UV[2] |
| Pixel Size | — | 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[2] |
| Array Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2] |
| Array False Defect Rate | — | ≤1.5%(all sizes)[2] |
| Random Defect Capture Rate | — | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[2] |
| Random False Defect Rate | — | ≤1.5% (all sizes)[2] |
| Repeatability | — | ≥90% (20 consecutive run on the same DSW wafer)[2] |
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