Comparison ledger
KLA 2133 Brightfield and KLA 2367, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2367KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer | Only one wafer size at a time |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA 2367 |
| Specifications | ||
| Configuration | 2 x 25 Auto Load[1] | Shinko LP[2] |
| Wafer size | Wafer Transfer[1] | Only one wafer size at a time[2] |
| Process Vac | 23 InHg[1] | — |
| Inlet Power | 3 line of 208 Vac 20 Amp[1] | — |
| CDA | 100 PSI[1] | — |
| Exhaust for Cooling | Blower[1] | — |
| SW Version | — | 10.4.507[2] |
| 300 mm (12") | — | Yaskawa + Asyst ISO Port or[2] |
| 200 mm (8") | — | Yaskawa + Asyst Versa Port (SMIF)[2] |
| GL | — | G Line[2] |
| IL | — | I Line[2] |
| VIS | — | Visible[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →