Comparison ledger
KLA 2133 Brightfield and KLA Surfscan SP 1 TBI, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 21xx | KLA Surfscan |
| Specifications | ||
| Configuration | 2 x 25 Auto Load[1] | 50/60 Hz[2] |
| Wafer size | Wafer Transfer[1] | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[2] |
| Process Vac | 23 InHg[1] | — |
| Inlet Power | 3 line of 208 Vac 20 Amp[1] | — |
| CDA | 100 PSI[1] | — |
| Exhaust for Cooling | Blower[1] | — |
| Phase | — | 208-240 V, Single phase[2] |
| Full Load Amps | — | 24 A[2] |
| Machine Main Breaker Rating | — | 30 A[2] |
| Ampere Rating of Largest Load | — | 12 A[2] |
| Bright Field (DIC) Option, P/N | — | 515990[2] |
| XY Coordination, P/N | — | 0082158-000[2] |
| Bright Field Sizing, P/N | — | 0082158-000[2] |
| Haze Normalization, Haze Analysis, P/N | — | 0081928-000[2] |
| SEC-1, P/N | — | 0021643-000[2] |
| HSMS, P/N | — | 528080[2] |
| PC-NFS Cient, P/N | — | 556025[2] |
| Desktop PC Software Option, P/N | — | 528170[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →