Comparison ledger
KLA 2138 XP and KLA 2367, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2138 XPKLA | 2367KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | Only one wafer size at a time |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2138 XP | KLA 2367 |
| Specifications | ||
| SW Version | — | 10.4.507[1] |
| Wafer size | — | Only one wafer size at a time[1] |
| 300 mm (12") | — | Yaskawa + Asyst ISO Port or[1] |
| Configuration | — | Shinko LP[1] |
| 200 mm (8") | — | Yaskawa + Asyst Versa Port (SMIF)[1] |
| GL | — | G Line[1] |
| IL | — | I Line[1] |
| VIS | — | Visible[1] |
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