Waferpedia

Comparison ledger

2138 XP versus 2367 Brightfield

KLA 2138 XP and KLA 2367 Brightfield, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA 2138 XPKLA 2367
Specifications
Power Requirements208 V, 16 A, 50 / 60 Hz, 3 Phase[1]
CE MarkedYes[1]
ConfigurationORS Upgrade[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing