Waferpedia

Comparison ledger

2138 XP versus Altair 8920 i Patterned Wafer Particle Defect

KLA 2138 XP and KLA Altair 8920 i Patterned Wafer Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
2138 XPKLA
Altair 8920 i Patterned Wafer Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 2138 XPKLA Altair 8920
Specifications
Voltage—208 VAC[1]
Configuration—50/60 Hz[1]
Phase—3 Phase[1]
2138 XP entryAltair 8920 i Patterned Wafer Particle Defect entry

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing