Comparison ledger
KLA 2138 XP and KLA P-15, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2138 XPKLA | P-15KLA |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2138 XP | KLA P-15 |
| Specifications | ||
| Sample table | — | 200 mm sample table with vacuum[1] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[1] |
| Maximum sample thickness | — | 20 mm[1] |
| Minimum sample length | — | 25 mm[1] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →