Comparison ledger
KLA 2138 XP and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2138 XPKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2138 XP | KLA P |
| Specifications | ||
| Configuration | — | Refurbished[1] |
| Option | — | Stress, 3D. GEM / SECS[1] |
| Stage | — | Fully Motorized X-Y,Z, Theta, Level Stage[1] |
| Stylus | — | 2 um / 60D[1] |
| OS | — | Windows XP[1] |
| Software | — | Profiler V 7.35[1] |
| Vertical Range | — | 327 um[1] |
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