Comparison ledger
KLA 2351 and KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2351KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Wafer Transfer System | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2351 | KLA Surfscan |
| Cited variants | — | |
| Specifications | ||
| Configuration | With HDD & Software[3] | 300mm FOUP handler[1] |
| Load Port Qty | 2[3] | — |
| Wavelength Illumination | 370~720 nm[3] | — |
| Wavelength Band | Visible, UV[3] | — |
| Pixel Size | 0.16μm / 0.20μm / 0.25μm / 0.39μm / 0.62μm[3] | — |
| Array Defect Capture Rate | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[3] | — |
| Array False Defect Rate | ≤1.5%(all sizes)[3] | — |
| Random Defect Capture Rate | ≥90% (0.16 um, 0.20 um, 0.25 um, 0.39 um, 0.62 um sensitivities)[3] | — |
| Random False Defect Rate | ≤1.5% (all sizes)[3] | — |
| Repeatability | ≥90% (20 consecutive run on the same DSW wafer)[3] | — |
| Wafer size | Wafer Transfer System[3] | — |
| Retested the CPU at bench test | — | CPU boots up with display but mouse and keyboard not working[1] |
| 75mW Laser | — | visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1] |
| Need replacement of Bright Field laser | — | Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1] |
| 2 loadports | — | 1 not functioning[5] |
| Largest Load | — | 26 A (Laser)[5] |
| Input Current | — | 30 A, 3 Phase, 50/60 Hz[5] |
| Phase | — | 3 Phase[2] |
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