Comparison ledger
KLA 2367 and KLA P 16 + Profiler, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2367KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Only one wafer size at a time | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2367 | KLA P |
| Specifications | ||
| SW Version | 10.4.507[1] | — |
| Wafer size | Only one wafer size at a time[1] | — |
| 300 mm (12") | Yaskawa + Asyst ISO Port or[1] | — |
| Configuration | Shinko LP[1] | Refurbished[2] |
| 200 mm (8") | Yaskawa + Asyst Versa Port (SMIF)[1] | — |
| GL | G Line[1] | — |
| IL | I Line[1] | — |
| VIS | Visible[1] | — |
| Option | — | Stress, 3D. GEM / SECS[2] |
| Stage | — | Fully Motorized X-Y,Z, Theta, Level Stage[2] |
| Stylus | — | 2 um / 60D[2] |
| OS | — | Windows XP[2] |
| Software | — | Profiler V 7.35[2] |
| Vertical Range | — | 327 um[2] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →