Comparison ledger
KLA 2367 and KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | 2367KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | Only one wafer size at a time | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2367 | KLA Surfscan |
| Cited variants | — | |
| Specifications | ||
| SW Version | 10.4.507[3] | — |
| Wafer size | Only one wafer size at a time[3] | — |
| 300 mm (12") | Yaskawa + Asyst ISO Port or[3] | — |
| Configuration | Shinko LP[3] | 300mm FOUP handler[1] |
| 200 mm (8") | Yaskawa + Asyst Versa Port (SMIF)[3] | — |
| GL | G Line[3] | — |
| IL | I Line[3] | — |
| VIS | Visible[3] | — |
| Retested the CPU at bench test | — | CPU boots up with display but mouse and keyboard not working[1] |
| 75mW Laser | — | visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1] |
| Need replacement of Bright Field laser | — | Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1] |
| 2 loadports | — | 1 not functioning[4] |
| Largest Load | — | 26 A (Laser)[4] |
| Input Current | — | 30 A, 3 Phase, 50/60 Hz[4] |
| Phase | — | 3 Phase[2] |
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