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Alpha Step D 300 Stylus versus Surfscan SP 1 DLS Particle Defect

KLA Alpha Step D 300 Stylus and KLA Surfscan SP 1 DLS Particle Defect, side by side. Every value shown is drawn from its cited encyclopedia entry.

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Side-by-side comparison of selected equipment models
Attribute
Alpha Step D 300 StylusKLA
Surfscan SP 1 DLS Particle DefectKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA Alpha StepKLA Surfscan
Cited variants—
  • Surfscan SP 1 DLS Particle Defect System, 12 inch[1]
  • Surfscan SP 1 DLS Particle Defect System, 8 inch[2]
Specifications
ConfigurationIssue with the style module[3]300mm FOUP handler[1]
Instrument typeStylus-based surface profiler[4]—
Stylus tip radius2 µm[4]—
Step height measurement range50 nm to 300 µm[4]—
Measurement principleStylus placed in contact with and dragged along the substrate surface; vertical deflection measures change in step height[4]—
Supported substrate typesSilicon, Silicon Germanium, Quartz, Sapphire, Glass, Germanium, Silicon Carbide, Gallium Nitride, III-V, Gallium Arsenide, Polymer, Carbon Polymer Based, Lithium Niobate[4]—
Supported substrate sizesPieces, 2 inch, 3 inch, 4 inch, 6 inch wafer[4]—
Maximum load1[4]—
CleanlinessFlexible[4]—
Stylus scan distance used in roughness testing3 mm[5]—
Manufacturer locationKLA-Tencor Corporation, Milpitas, CA[5]—
Retested the CPU at bench test—CPU boots up with display but mouse and keyboard not working[1]
75mW Laser—visually still lasting, but unable to determine the life span or quality of the laser due to inaccessibility of LonBrowser diag file.[1]
Need replacement of Bright Field laser—Hene 7mW laser PS is dead (Model: 103-2300-6-2 194016)[1]
2 loadports—1 not functioning[6]
Largest Load—26 A (Laser)[6]
Input Current—30 A, 3 Phase, 50/60 Hz[6]
Phase—3 Phase[2]
Alpha Step D 300 Stylus entrySurfscan SP 1 DLS Particle Defect entry

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Sources (6)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]inventory listing
  4. [4]snfguide.stanford.edusnfguide.stanford.edu
  5. [5]frontiersin.orgfrontiersin.org
  6. [6]inventory listing