Comparison ledger
KLA Alpha Step D 300 Stylus and KLA Surfscan SP 1 TBI, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Alpha Step | KLA Surfscan |
| Specifications | ||
| Configuration | Issue with the style module[1] | 50/60 Hz[4] |
| Instrument type | Stylus-based surface profiler[2] | — |
| Stylus tip radius | 2 µm[2] | — |
| Step height measurement range | 50 nm to 300 µm[2] | — |
| Measurement principle | Stylus placed in contact with and dragged along the substrate surface; vertical deflection measures change in step height[2] | — |
| Supported substrate types | Silicon, Silicon Germanium, Quartz, Sapphire, Glass, Germanium, Silicon Carbide, Gallium Nitride, III-V, Gallium Arsenide, Polymer, Carbon Polymer Based, Lithium Niobate[2] | — |
| Supported substrate sizes | Pieces, 2 inch, 3 inch, 4 inch, 6 inch wafer[2] | — |
| Maximum load | 1[2] | — |
| Cleanliness | Flexible[2] | — |
| Stylus scan distance used in roughness testing | 3 mm[3] | — |
| Manufacturer location | KLA-Tencor Corporation, Milpitas, CA[3] | — |
| Phase | — | 208-240 V, Single phase[4] |
| Full Load Amps | — | 24 A[4] |
| Machine Main Breaker Rating | — | 30 A[4] |
| Ampere Rating of Largest Load | — | 12 A[4] |
| Bright Field (DIC) Option, P/N | — | 515990[4] |
| XY Coordination, P/N | — | 0082158-000[4] |
| Bright Field Sizing, P/N | — | 0082158-000[4] |
| Haze Normalization, Haze Analysis, P/N | — | 0081928-000[4] |
| SEC-1, P/N | — | 0021643-000[4] |
| HSMS, P/N | — | 528080[4] |
| PC-NFS Cient, P/N | — | 556025[4] |
| Desktop PC Software Option, P/N | — | 528170[4] |
| Wafer size | — | ・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil[4] |
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