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Comparison ledger

Altair 8900 Defect versus P-20H

KLA Altair 8900 Defect and KLA P-20H, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size
Process node
Introduced
Production run
LifecycleLegacy
Lifecycle milestones
Control system
Generation
FamilyKLA Altair 8900 DefectKLA P-20H
Specifications
ConfigurationFor CMOS Image Sensor Applications[1]
ModuleTwo Main Devices and a Set of UPS[1]
Wires5, Phases: 3[1]
Max AIC10,000[1]
Volts AC208 V[1]
Amps25[1]
Freq50 / 60 Hz[1]
SCCR (A)5,000[1]
Tool typeStylus profilometer[2]
Stylus tip radius2 µm[2]
Stylus cone angle60°[2]
Vertical range325 µm[2]
Sensor elementCapacitive sensor element[2]
Motion stagePrecision motion stage[2]
Vertical resolutionRoughly nm scale[2]
Stage movement8 inch[2]
Serial number09940111[2]
Tool ownerJoseph Jacob[2]
Access modeWalk-up tool (no reservation needed)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]nanofab.utah.edunanofab.utah.edu