Waferpedia

Comparison ledger

Archer 10 XT Overlay versus FLX 2320

KLA Archer 10 XT Overlay and KLA FLX 2320, side by side. Every value shown is drawn from its cited encyclopedia entry.

Side-by-side comparison of selected equipment models
Attribute
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size200mm
Process node
Introduced
Production run
Lifecycle
Lifecycle milestones
Control system
Generation
FamilyKLA ArcherKLA FLX 2320
Specifications
ConfigurationDuring refurbishment the loadports were replaced with the cassette loader that is shown in our video below[1]Refurbished[2]
Wafer size200mm dual port open wafer handler[1]
Dual Wavelength Scanning670 nm, 785 nm[2]
Software Version4.4[2]
Operation ManualDigital Copy[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing