Comparison ledger
KLA Candela CS 20 V and KLA P-15, side by side. Every value shown is drawn from its cited encyclopedia entry.
| Attribute | P-15KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | 200mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA Candela CS 20 | KLA P-15 |
| Specifications | ||
| Voltage | 230 VAC[1] | — |
| Configuration | 50/60 Hz[1] | — |
| Phase | 3 Phase[1] | — |
| Chuck | 2-5"[2] | — |
| Wafer sizes | 4-inch and 6-inch[3] | — |
| Chuck sizes | 4-inch and 6-inch[3] | — |
| Software vs | Candela Wafer Version 6.8 Build 16[3] | — |
| Laser specs | 405 nm oblique-incidence laser and 660 nm normal-incidence laser[3] | — |
| Sample table | — | 200 mm sample table with vacuum[4] |
| Measurement range | — | Measures steps from 100 Å to 300 µm[4] |
| Maximum sample thickness | — | 20 mm[4] |
| Minimum sample length | — | 25 mm[4] |
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